Development of a Silicon Nitride Platform for Next Photonic Integrated Circuits

B. Ahammou; N. Dalvand; B. L. Le Drogoff; Y. Ouldhnini; A. Radi; M. Taghavi; K. Ghuman; J. Margot; M. Ménard; M. Chaker

Development of a Silicon Nitride Platform for Next Photonic Integrated Circuits

B. Ahammou
, N. Dalvand
, B. L. Le Drogoff
, Y. Ouldhnini
, A. Radi
, M. Taghavi
, K. Ghuman
, J. Margot
, M. Ménard
, M. Chaker

Research output: Contribution to journal › Conference article › peer-review

Abstract

As an ideal platform for photonic integrated circuits, silicon nitride material is explored. In particular, we investigate residual stress and cracking limits in SiNₓ films through experimental and computational approaches, as well as plasma-based SiNₓ nanopatterning.

Original language	English
Pages (from-to)	353
Number of pages	1
Journal	International Conference on Metamaterials, Photonic Crystals and Plasmonics
Publication status	Published - 2025
Externally published	Yes
Event	15th International Conference on Metamaterials, Photonic Crystals and Plasmonics, META 2025 - Malaga, Spain Duration: 22 Jul 2025 → 25 Jul 2025

Cite this

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title = "Development of a Silicon Nitride Platform for Next Photonic Integrated Circuits",

abstract = "As an ideal platform for photonic integrated circuits, silicon nitride material is explored. In particular, we investigate residual stress and cracking limits in SiNₓ films through experimental and computational approaches, as well as plasma-based SiNₓ nanopatterning.",

author = "B. Ahammou and N. Dalvand and \{Le Drogoff\}, \{B. L.\} and Y. Ouldhnini and A. Radi and M. Taghavi and K. Ghuman and J. Margot and M. M{\'e}nard and M. Chaker",

note = "Publisher Copyright: {\textcopyright} 2025, META Conference. All rights reserved.; 15th International Conference on Metamaterials, Photonic Crystals and Plasmonics, META 2025 ; Conference date: 22-07-2025 Through 25-07-2025",

year = "2025",

language = "English",

pages = "353",

journal = "International Conference on Metamaterials, Photonic Crystals and Plasmonics",

issn = "2429-1390",

publisher = "META Conference",

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TY - JOUR

T1 - Development of a Silicon Nitride Platform for Next Photonic Integrated Circuits

AU - Ahammou, B.

AU - Dalvand, N.

AU - Le Drogoff, B. L.

AU - Ouldhnini, Y.

AU - Radi, A.

AU - Taghavi, M.

AU - Ghuman, K.

AU - Margot, J.

AU - Ménard, M.

AU - Chaker, M.

PY - 2025

Y1 - 2025

N2 - As an ideal platform for photonic integrated circuits, silicon nitride material is explored. In particular, we investigate residual stress and cracking limits in SiNₓ films through experimental and computational approaches, as well as plasma-based SiNₓ nanopatterning.

AB - As an ideal platform for photonic integrated circuits, silicon nitride material is explored. In particular, we investigate residual stress and cracking limits in SiNₓ films through experimental and computational approaches, as well as plasma-based SiNₓ nanopatterning.

UR - https://www.scopus.com/pages/publications/105014468947

M3 - Conference article

AN - SCOPUS:105014468947

SN - 2429-1390

SP - 353

JO - International Conference on Metamaterials, Photonic Crystals and Plasmonics

JF - International Conference on Metamaterials, Photonic Crystals and Plasmonics

T2 - 15th International Conference on Metamaterials, Photonic Crystals and Plasmonics, META 2025

Y2 - 22 July 2025 through 25 July 2025

ER -

Development of a Silicon Nitride Platform for Next Photonic Integrated Circuits

Abstract

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