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High-frequency magnetoplasmas in electronegative gases
J. Margot
, M. Chaker
, L. St-Onge
, M. Tabbal
, A. Aliouchouche
, O. Pauna
,
C. Alinot
, C. Kliagine
University of Montreal
Institut national de la recherche scientifique
National Research Council of Canada
Research output
:
Contribution to journal
›
Journal Article
›
peer-review
6
Citations (Scopus)
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Keyphrases
Gasses
100%
Magnetoplasma
100%
Electronegative
100%
Electronegative Gas
100%
Argon
50%
Submicron
50%
Microelectronics Industry
50%
Particle Content
50%
Power Balance
50%
Charge Carriers
50%
Negative Charge
50%
Negative Ions
50%
Charged Particles
50%
High-density Plasma
50%
Argon Plasma
50%
Physics
Thin Films
100%
Plasma Density
100%
Plasma Physics
100%
Argon Plasma
100%
Charged Particle
100%
Material Science
Charge Carrier
100%
Thin Films
100%
Plasma Density
100%