Keyphrases
Piezo
100%
MEMS Resonator
100%
Mechanical Mode
100%
Bulk Acoustic Wave
100%
On-Silicon
100%
Q-enhancement
100%
Tank Configurations
100%
Resonator
75%
Piezoelectric Thin Film
75%
Multicrystalline Silicon
50%
Wineglass Mode
50%
Dynamic Selection
25%
Superior Performance
25%
Design Considerations
25%
Quality Factor (Q-factor)
25%
Breathing Mode
25%
Fold Increase
25%
High Quality Factor
25%
Fully Differential
25%
Mechanical Dynamics
25%
Motional Resistance
25%
Mechanically Coupled
25%
Enhancement Factor
25%
Unloaded Quality Factor
25%
In-plane Shear
25%
Low Phase Noise Oscillator
25%
Coupled Tanks
25%
Engineering
Microelectromechanical System
100%
Resonator
100%
Bulk Silicon
100%
Thin Films
60%
Piezoelectric
60%
Silicon Single Crystal
40%
Oscillator
20%
Q Factor
20%
Mode Selection
20%
Phase Noise
20%
Design Consideration
20%
Fold Increase
20%
High Quality Factor
20%
Enhancement Factor
20%
In-Plane Shear
20%
Breathing
20%
Material Science
Microelectromechanical System
100%
Silicon
100%
Resonator
100%
Bulk Silicon
100%
Piezoelectricity
60%
Thin Films
60%
Single Crystal
40%
Oscillator
20%