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A resettable polysilicon MEMS-based circuit breaker
Abdurrashid Hassan Shuaibu
, Almur A.S. Rabih
,
Yves Blaquiére
,
Frederic Nabki
École de technologie supérieure
Electrical Engineering Department
LACIME - Communications and Microelectronics Integration Laboratory
École de technologie supérieure
Research output
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Contribution to journal
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Journal Article
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peer-review
Overview
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Keyphrases
Actuation Voltage
50%
Circuit Breaker
100%
Contact Force
50%
Contact Resistance
50%
Current Limiting
50%
Current Protection
50%
Dual Airgap
50%
Electrostatic Actuation
100%
Joule Heating
50%
MEMS-based
100%
Micro-bridge
50%
Micro-electro-mechanical Systems
50%
PolyMUMPs
50%
Polysilicon
50%
Polysilicon MEMS
100%
Protection Application
50%
Resettable
100%
Single Contact
50%
Stable Contact
50%
Straight Beam
50%
Suspended Structure
50%
Switching Efficiency
50%
Systems-based
50%
Engineering
Circuit Breaker
100%
Contact Force
50%
Electrostatic Actuation
100%
Experimental Result
50%
Microelectromechanical System
100%
Polysilicon
100%
Resistance Heating
50%