Inkjet printed sol-gel titania precursor atop MEMS resonator for precise frequency control and tuning

Jaime Alberto Benavides-Guerrero
, Luis Felipe Gerlein
, Mathieu Gratuze
, Fabrice Vaussenat
, Michael Menard
, Frederic Nabki
, Martin Bolduc
, Sylvain G. Cloutier

École de technologie supérieure
Université du Québec à Trois-Rivières

Research output: Contribution to journal › Journal Article › peer-review

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Material Science