MEMS Microbreaker With Electrostatically Actuated Closure and Tunable Electrothermal Reset

Engineering

• Microelectromechanical System 100%
• Closed State 100%
• Circuit Breaker 66%
• Gate Voltage 66%
• Resistance Heating 33%
• System Protection 33%
• Elevated Temperature 33%
• Actuation 33%
• Temperature Coefficient 33%
• Microfabrication 33%
• Electrostatic Actuation 33%
• Experimental Characterization 33%
• Contact Force 33%
• Gate Bias 33%

Keyphrases

• Gate Voltage 66%
• Reversible Switching 33%
• Open State 33%
• Hold Power 33%
• Conduction Behavior 33%
• Reset Current 33%
• Contact Closure 33%
• Electrical Protection 33%
• Trip Point 33%
• Dual Airgap 33%
• Fast-acting 33%
• Gate Bias 33%
• Temperature-dependent Measurements 33%
• Heating-induced 33%

Material Science

• Contact Resistance 33%