Push–Push Electrothermal MEMS Actuators with Si-to-Si Contact for DC Power Switching Applications
- Abdurrashid Hassan Shuaibu
- , Almur A.S. Rabih
- , Yves Blaquière
- , Frederic Nabki
- École de technologie supérieure
Research output: Contribution to journal › Journal Article › peer-review
4
Citations
(Scopus)