Reduction of Motional Resistance Using Piezoelectric on Silicon MEMS Disk Arrays for Ambient Air Applications
- Abid Ali
- , Suaid Tariq Balghari
- , Muhammad Wajih Ullah Siddiqi
- , Frederic Nabki
- Simon Fraser University
- Université du Québec à Montréal
- KYOCERA Technologies Oy
Research output: Contribution to journal › Journal Article › peer-review
1
Citation
(Scopus)