Conception et intégration de circuits CMOS et de microsystèmes électromécaniques (MEMS) pour la synthèse d'un oscillateur à haute performance

Abstract

The miniaturization of electronic components is an important issue in the industry. This trend allows, among other things, to reduce the power consumption of system to offer more features and to reduce the price. One of the circuits affected by miniaturization is the oscillator. This oscillator generates a reference frequency which is used to synchronize the operations of the different digital or analog circuits of a system. Currently, a quartz resonator is used. The latter has an extremely stable reference frequency in temperature, but has several disadvantages such as a relatively high manufacturing price, a large size and the impossibility of being integrated with the integrated circuit manufacturing technologies. The current alternative is to replace quartz resonators with micro-resonator. These resonators are microelectromechanical systems (MEMS) which can be manufactured with technologies compatible with those of integrated circuits. In addition, MEMS resonators are much smaller and are manufactured at low cost. Their main disadvantage is the variation of their frequency as a function of temperature. The various passive temperature compensation techniques are the subject of the literature review of the first chapter of this thesis. The second chapter presents the first contribution to the design, fabrication and testing of piezoelectric and electrostatic MEMS resonators. Commercial technology PiezoMUMPS was used. Two main techniques were evaluated to reduce the impact of temperature on the resonant frequency, namely the design of resonator anchors and the addition of holes in the structure of electrostatic resonators. Finally, the third chapter presents the second contribution of this work by presenting two integrated transimpedance amplifier circuits. The first integrated circuit was manufactured with IBM 130 nm CMOS technology and has been tested. The second circuit was manufactured using TSMC CMOS 65 nm technology. This circuit includes two new features compared to the 130 nm circuit, which is a control circuit that allows the amplifier to be used with two resonators that have different frequencies, allowing telecommunication applications, and an automatic phase control circuit, ensuring the oscillation of the system.

Date	21 May 2019
Original language	French
Awarding Institution	École de technologie supérieure
Supervisor	Frédéric Nabki (Supervisor)