Study, design, and characterization of anchor loss reduction and tuning the frequency of MEMS resonators for timing applications

Abstract

Electrically powered devices and machines with electronic components require precise timing to function properly. The need for accuracy has become increasingly critical with the growth of high-speed telecommunications and data processing. To meet the demand for more efficient and faster electronic circuits and compact devices, the development of new generations of micro-electromechanical systems (MEMS) is necessary. The purpose of this study is to contribute to the advancement of knowledge on anchor loss and tunability of MEMS resonant devices. To begin, a comprehensive review of the literature was conducted to provide an overview of MEMS devices, their applications, and fabrication processes. Next, this thesis presents the modeling, design, and fabrication of clamped-clamped beam MEMS resonant devices with a focus on reducing anchor loss. The work examines the impact of different shapes of energy reflector holes on the anchoring structure’s anchor loss and the beam resonator’s quality factor. This thesis also explores the design and fabrication of a tunable MEMS resonator. The device comprises a resonator anchored on both sides through suspended beams, situated between two DC actuators with springs. The activation of each actuator increases the frequency of the resonator through the added stiffness of the anchoring structure and resonator. The simplicity of the structure provides high tunability of the resonant structure, which is a notable advantage of this work.

Date	25 Aug 2023
Original language	American English
Awarding Institution	École de technologie supérieure
Supervisor	Frédéric Nabki (Supervisor)