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Engineering
Microelectromechanical System
100%
Resonator
42%
Piezoelectric
31%
Electric Power Utilization
29%
Amplifier
29%
Electrostatic Force
26%
Transducer
25%
Actuator
25%
Ultrasonics
24%
Front End
24%
Capacitive
20%
Q Factor
18%
Nitride
18%
Actuation
16%
Micro-Electro-Mechanical System
14%
Ultra-Wideband
13%
Harmonics
12%
Waveguide
12%
Low Power Consumption
11%
Low Noise Amplifier
11%
Integrated Circuit
10%
Resonant Frequency
9%
Radio Frequency
9%
Mixers (Machinery)
9%
Harvester
8%
Surface Micro-Machining
8%
Software Defined Radio
8%
Data Rate
8%
Local Oscillator
8%
Charge Pump
8%
Voltage-Controlled Oscillator
8%
Phase Noise
8%
Signal conditioning circuits
7%
Noise Figure
7%
Time Domain
7%
Supply Voltage
7%
Electrostatic Actuation
7%
Avionics
7%
Conservation of Energy
7%
Transistor
7%
Optical Switch
7%
Resonance Frequency
6%
Degree of Freedom
6%
Photonics
6%
Low-Temperature
6%
Output Voltage
6%
Microfabrication
6%
Phase Locked Loop
6%
Experimental Result
6%
Micromotors
5%
Keyphrases
Micro-electro-mechanical Systems
58%
Low Power
31%
CMOS Technology
30%
Resonator
26%
Power Consumption
24%
Silicon Nitride
22%
Resonant Frequency
21%
Wideband
19%
MEMS Resonator
18%
Actuator
15%
Receiver Front End
15%
Transimpedance Amplifier
14%
IR-UWB
14%
Radiofrequency
14%
Reconfigurable
12%
Transmitter
12%
Silicon Waveguide
12%
Above-IC
11%
Local Oscillator
11%
65nm CMOS
11%
Wideband Transmitter
10%
Phase Noise
10%
Noise Figure
10%
Silicon Carbide
10%
Piezoelectric Micromachined Ultrasonic Transducer (pMUT)
9%
PolyMUMPs
9%
Insertion Loss
9%
Waveguide
9%
PiezoMUMPs
9%
Optical Switch
9%
Low Noise Amplifier
9%
Bulk Mode
9%
Capacitive Micromachined Ultrasonic Transducer
8%
Frequency Synthesizer
8%
Software Defined Radio
8%
Surface Micromachining Process
8%
Silicon Photonics
8%
MEMS-based
8%
130 Nm CMOS
8%
Signal Conditioning Circuit
8%
Ultra-wideband
8%
Ultra-low Power
8%
Electrostatic Actuation
8%
Electrothermal
8%
Surface Micromachining
7%
Beam Resonators
7%
Low Temperature
7%
Rotary
7%
Fabrication Methods
7%
Electrostatic Actuator
7%