MEMS Microbreaker With Electrostatically Actuated Closure and Tunable Electrothermal Reset

Keyphrases

• Actuation 33%
• Adhesion 33%
• Breaker 66%
• Circuit Breaker 66%
• Closed State 100%
• Conduction Behavior 33%
• Conduction Current 33%
• Contact Closure 33%
• Contact Force 33%
• Contact Interface 66%
• Contact Resistance 33%
• Electrical Protection 33%
• Electrostatic Actuation 33%
• Electrostatically Actuated 100%
• Electrothermal 100%
• Elevated Temperature 33%
• Energy Efficient 33%
• Experimental Characterization 33%
• Fast-acting 33%
• Gate Bias 33%
• Gate Voltage 66%
• Harsh Environment 33%
• Harsh Environment Applications 33%
• Heating-induced 33%
• Hold Power 33%
• Joule Heating 33%
• Leakage Current 33%
• Micro-electro-mechanical Systems 100%
• Microfabrication 33%
• Minimum Current 33%
• Open State 33%
• Operating Conditions 33%
• Protection System 33%
• Reset Current 33%
• Reversible Switching 33%
• Systems-based 33%
• Temperature Coefficient of Resistance 33%
• Temperature-dependent Measurements 33%
• Thermal Recovery 33%
• Thermally Induced 66%
• Trip Point 33%

Engineering

• Actuation 33%
• Circuit Breaker 66%
• Closed State 100%
• Contact Force 33%
• Electrostatic Actuation 33%
• Elevated Temperature 33%
• Experimental Characterization 33%
• Gate Bias 33%
• Gate Voltage 66%
• Microelectromechanical System 100%
• Microfabrication 33%
• Resistance Heating 33%
• System Protection 33%
• Temperature Coefficient 33%