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Bidirectional Electrostatic Rotary MEMS Actuator Achieving ±3.2° Angular Displacement
Navid Heidari
, Mohammadreza Kolahdouz Moghaddam
, Seyedfakhreddin Nabavi
,
Michael Menard
,
Frederic Nabki
Université du Québec à Montréal
Research output
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Journal Article
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peer-review
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Dive into the research topics of 'Bidirectional Electrostatic Rotary MEMS Actuator Achieving ±3.2° Angular Displacement'. Together they form a unique fingerprint.
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Engineering
Analytical Model
100%
Experimental Result
100%
Good Agreement
100%
Finite Element Analysis
100%
Lateral Displacement
100%
Analytical Result
100%
Actuation
100%
Micro-Electro-Mechanical System
100%
Microfabrication
100%
Electrostatic Actuation
100%
Low Power Consumption
100%
Photonics
100%
System Structure
100%
Micro-Electro-Mechanical System Actuator
100%
Angular Displacement
100%
Keyphrases
Comb Fingers
50%
Prototype Measurement
50%
Unidirectional Rotation
50%
Precise Displacement
50%