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Dive into the research topics of 'Bidirectional Electrostatic Rotary MEMS Actuator Achieving ±3.2° Angular Displacement'. Together they form a unique fingerprint.- Sort by
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Bidirectional Electrostatic Rotary MEMS Actuator Achieving ±3.2° Angular Displacement
- Navid Heidari
- , Mohammadreza Kolahdouz Moghaddam
- , Seyedfakhreddin Nabavi
- , Michael Menard
- , Frederic Nabki
Research output: Contribution to journal › Journal Article › peer-review