Bidirectional Electrostatic Rotary MEMS Actuator Achieving ±3.2° Angular Displacement
- Navid Heidari
- , Mohammadreza Kolahdouz Moghaddam
- , Seyedfakhreddin Nabavi
- , Michael Menard
- , Frederic Nabki
- Université du Québec à Montréal
Research output: Contribution to journal › Journal Article › peer-review