Bidirectional Electrostatic Rotary MEMS Actuator Achieving ±3.2° Angular Displacement

Engineering

• Analytical Model 100%
• Experimental Result 100%
• Good Agreement 100%
• Finite Element Analysis 100%
• Lateral Displacement 100%
• Analytical Result 100%
• Actuation 100%
• Micro-Electro-Mechanical System 100%
• Microfabrication 100%
• Electrostatic Actuation 100%
• Low Power Consumption 100%
• Photonics 100%
• System Structure 100%
• Micro-Electro-Mechanical System Actuator 100%
• Electrostatic Force 100%
• Angular Displacement 100%

Keyphrases

• Actuator 100%
• Micro-electro-mechanical Systems 100%
• Rotary 100%
• Angular Displacement 100%
• Lateral Displacement 50%
• Analytical Model 50%
• Control Power 50%
• Actuation Mechanism 50%
• Finite Element Simulation 50%
• Microfabrication Techniques 50%
• Electrostatic Actuation 50%
• Circular Shape 50%
• Low Power Consumption 50%
• PiezoMUMPs 50%
• Actuation Voltage 50%
• Displacement Control 50%
• Measurement Simulation 50%
• Photonic Systems 50%
• Prototype Measurement 50%
• Unidirectional Rotation 50%
• Precise Displacement 50%
• Comb Fingers 50%