Post-Release Metallization in MEMS Silicon-to-Silicon Contact Switches for On-Resistance Improvement
- Abdurrashid Hassan Shuaibu
- , Almur A.S. Rabih
- , Yves Blaquière
- , Frederic Nabki
- École de technologie supérieure
Research output: Contribution to journal › Journal Article › peer-review
1
Citation
(Scopus)